SYSTEMS AND METHODS FOR INTERNAL SURFACE CONDITIONING IN PLASMA PROCESSING EQUIPMENT

摘要

A method of conditioning internal surfaces of a plasma source includes flowing first source gases into a plasma generation cavity of the plasma source that is enclosed at least in part by the internal surfaces. Upon transmitting power into the plasma generation cavity, the first source gases ignite to form a first plasma, producing first plasma products, portions of which adhere to the internal surfaces. The method further includes flowing the first plasma products out of the plasma generation cavity toward a process chamber where a workpiece is processed by the first plasma products, flowing second source gases into the plasma generation cavity. Upon transmitting power into the plasma generation cavity, the second source gases ignite to form a second plasma, producing second plasma products that at least partially remove the portions of the first plasma products from the internal surfaces.

主权项

1. A plasma source, comprising:
a plasma generation cavity that is enclosed at least in part by one or more internal surfaces and is upstream from a process chamber; a power supply for transmitting power into the plasma generation cavity to generate a plasma; a gas delivery system for introducing one or more first source gases into the plasma generation cavity at a first time, and for introducing one or more second source gases into the plasma generation cavity at a second time, wherein:
one or more of the first source gases are different from one or more of the second source gases,when the power is transmitted into the plasma generation cavity at the first time, the one or more first source gases ignite to form a first plasma, producing first plasma products,a portion of the first plasma products flow downstream to the process chamber to process a workpiece,a portion of the first plasma products adhere to the one or more internal surfaces,when the power is transmitted into the plasma generation cavity at the second time, the one or more second source gases ignite to form a second plasma, producing second plasma products, andthe second plasma products at least partially remove the portion of the first plasma products from the one or more internal surfaces.