| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor having a new structure and stable performance at a low cost by digitally calculating signals from electrodes with a sensor head having three fixed electrodes, and detecting the acceleration in three axial directions. SOLUTION: A metal electrode is formed on one face of a glass substrate as a fixed electrode layer 20, it is uniformly divided into three on a circumference with the required radius centering on the Z-axis to arrange three electrodes, and a silicon substrate is machined to form a flexible substrate layer 21 to form electrostatic capacity elements C1 -C3 arranged with three electrode pairs face to face in the X-axis direction. A heavy bob body 23 is connected beneath a moving electrode, and a silicone substrate layer 24 constituted of a pedestal layer 22 for securing a moving space and a stopper at the time of an overload is laminated to manufacture an electrostatic capacity type acceleration sensor with a four-layer structure. The fixed electrode layer 20 of a glass plate arranged on the face opposite to the flexible substrate layer 21 is provided with electrode lead pads on the flexible substrate layer 21 from peripheral notch gaps to connect leads 26 to the outside from the electrodes on the opposite faces. |
