| 摘要 |
PURPOSE: A device for manufacturing semiconductor is provided to load a boat into a reaction chamber after piling up many wafers in the boat to process many wafers at a same time. CONSTITUTION: A cassette is contained substrates. The cassette is loaded on a cassette loader. A transfer absorbs the substrate and sends the substrate to a boat(20) into a main body(3) through the first and the second position settlement grooves(24a¯24c,25a¯25c) on the first and the second inserting holes(24, 25). The grooves(24a¯24c,25a¯25c) make pairs with protruding supporters(30, 31) in the boat(20) to maintain the substrate same direction and same position. The gas passes through an inhalation duct between the inside wall of the main body(3) and a thin plate. The gas goes through between the substrates in the boat(20) for vaporizing. After vaporizing, the remained gas flows through an exhausting duct, and goes out through discharging hole(22) on an upper plate(4). The drawing part extracts the boat(20) from the main body.
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