Evanescent Field Opto-Mechanical Displacement Sensor and Phase Shifter

摘要

A method and system described for sensing a displacement by receiving and propagating a laser light signal with an etched waveguide that is configured to enable an evanescent optical field above the waveguide surface. A movable perturber can be positioned so the perturber interacts with the evanescent optical field above the waveguide surface. An optical phase shift can be induced in the waveguide when the movable perturber is displaced in the evanescent optical field, and the optical phase shift can be measured with an optical readout circuit.

主权项

1. A displacement sensor system, comprising:
a waveguide core deposited on top of a lower cladding, wherein the waveguide core comprises an etched waveguide that is configured to receive and propagate light from a laser source and to enable an evanescent optical field above the waveguide surface; and a movable perturber suspended above the etched waveguide and positioned to interact with the evanescent optical field above the waveguide surface; wherein the evanescent field interaction induces an optical phase shift when the movable perturber is displaced.