发明名称 AUTOMATIC FOCUSING DEVICE
摘要 PROBLEM TO BE SOLVED: To improve accuracy of automatic focusing of an automatic focusing device by reducing focusing time. SOLUTION: This automatic focusing device 1 is equipped with evaluation means 11, 12 with different detection accuracy of focal position, and focuses by using these evaluation means. The evaluation means 11 with coarse detection accuracy of the focal position focuses roughly in a short period by using evaluation values obtained by broad detection of the focal position. The evaluation means 12 with fine detection accuracy of the focal position focuses very precisely by using evaluation values obtained by narrow detection in vicinity of the focal point obtained by the coarse detection means 11. With a combination of different evaluation values of different characteristics, a period of focusing is reduced and accuracy of focusing is improved.
申请公布号 JP2000182555(A) 申请公布日期 2000.06.30
申请号 JP19980355926 申请日期 1998.12.15
申请人 SHIMADZU CORP 发明人 MITAMURA SHIGEHIRO
分类号 H01J37/21;G02B7/28;G03F7/207;H01L21/027;(IPC1-7):H01J37/21 主分类号 H01J37/21
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