发明名称 Semiconductor wafer, semiconductor chip, and manufacturing method of semiconductor device
摘要 By using a small number of needles and contact terminals at burn-in, electric contact check is performed between each needle and each terminal provided in each semiconductor chip, and thereby the yield of assembled products can be improved. A packaging structure in which, for example, a volatile memory chip and a nonvolatile memory chip are formed is assembled in accordance with a production scheme in which burn-in of each memory chip is performed while still under the state of a semiconductor wafer, and by forming the packaged structure using the good volatile memory chip subjected to burn-in and likewise, also, the nonvolatile memory chip. At this burn-in, contact check is performed by bringing a needle, provided in a burn-in board, into contact with, for example, six test-only signal terminals of a test circuit formed on each semiconductor chip.
申请公布号 US2004184344(A1) 申请公布日期 2004.09.23
申请号 US20040764539 申请日期 2004.01.27
申请人 SAITOH YOSHIKAZU;MORITA SADAYUKI;SONODA TAKAHIRO 发明人 SAITOH YOSHIKAZU;MORITA SADAYUKI;SONODA TAKAHIRO
分类号 G01R31/30;G01R31/28;G11C29/00;G11C29/48;H01L21/66;(IPC1-7):G11C8/00 主分类号 G01R31/30
代理机构 代理人
主权项
地址