| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser optical apparatus capable of maintaining high performance. SOLUTION: The laser optical apparatus includes: a laser beam emitting part for emitting a laser beam; a laser beam receiving part for receiving the laser beam emitted by the laser beam emitting part; a converging optical unit 3 for guiding the laser beam emitted from the laser beam emitting part to the laser beam receiving part; actuators 8, 9 for transferring the converging optical unit; an intensity detector for detecting the intensity of the laser beam introduced to the laser beam receiving part; and a controller 7 which, on the basis of the laser beam intensity detected by the intensity detector, controls the operation of the actuators in the manner that the laser beam guided by the converging optical unit is radiated to the center in the incident face of the laser beam receiving part. The actuators includes a piezoelectric element and a vibrator, wherein, with micro vibration generated by the excitation of the piezoelectric element, the vibrator comes in contact with the converging optical unit in the manner actuating frictional force directly or indirectly thereon. COPYRIGHT: (C)2008,JPO&INPIT
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