Paintable diffusing agent composition

摘要

A diffusing agent composition of an aspect of the invention contains: a condensation product (A) made from a starting material that is an alkoxysilane represented by the following general formula (1):;[Chemical Formula 1]
R1mSi(OR2)4-m   (1)
where R1 and R2 are an organic group,
;a plurality of R1s and R2s included in condensation product are identical or different, and m is 0, 1 or 2,;the condensation product including an alkoxysilane where m=0 also including at least one alkoxysilane where m is 1 or 2; an impurity diffusion component (C); and an organic solvent (D).

主权项

1. A paintable diffusing agent composition used to diffuse an impurity diffusion component into a semiconductor substrate, comprising:
a condensation product (A) made from a starting material that is an alkoxysilane represented by the following general formula (1):
R1mSi(OR2)4-m   (1) where R1 and R2 are an organic group, a plurality of R1s and R2s included in condensation product are identical or different, and m is 0, 1 or 2,the condensation product including an alkoxysilane where m=0 also including at least one alkoxysilane where m is 1 or 2; a condensation product (B) made from a starting material that is an alkoxysilane represented by the following general formula (3):
Si(OR5)4   (3) wherein R5 is an organic group, and may be the same or different an impurity diffusion component (C); and an organic solvent (D), and wherein the condensation product (A) contains a structure represented by the following general formula (2): wherein X is an alkoxy group, Y is an organic group, and the ratio of n:1 ranges from 95:5. to 0:100; and wherein the ratio of the SiO2-converted mass (A:B) of the condensation product (A) to that of the condensation product (B) is from 85:15 to 5:95.