Improved specimen holder for a charged particle microscope

摘要

A specimen holder (H) for a Charged Particle Microscope, comprising:
- A support structure (1);
- An elongated member (3), a first end (3a) of which is connected to said support structure (1) and the second end (3b) of which comprises a specimen mounting zone (5), the elongated member (3) having a longitudinal axis (3') that extends along its length between said first (3a) and second ends (3b),
wherein said specimen mounting zone (5) comprises:
- A rotor (7) that is rotatable about a transverse axis (7') extending substantially perpendicular to said longitudinal axis (3');
- A paddle (9) connected to said rotor (7) so as to be rotatable about said transverse axis (7'), the paddle (9) comprising a specimen mounting area (11);
- Driving means (13) connected to said rotor (7), which can be invoked to rotate said paddle (9) through a rotational range that allows the paddle (9) to be inverted relative to an initial orientation thereof.