| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluorine-containing thin film which shows superior dimensional accuracy and mold releasability when formed on a precise die, against a molding or transferring operation for an article to be molded, for a long period of time and for a number of times at a high temperature condition in which the temperature of the article to be molded or the die exceeds 200°C, and to provide a method for manufacturing the substrate having the fluorine-containing thin film on the surface of the substrate. SOLUTION: The fluorine-containing thin film is formed on the surface of the substrate by using a compound which is expressed by Formula (1), (wherein R represents an alkyl group; R' represents a straight-chain or branched-chain alkylene group; and m represents an integer of 5 to 15), or an oligomer of the compound as a starting material. COPYRIGHT: (C)2008,JPO&INPIT
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