| 发明名称 |
Atomic force microscopy active optical probe |
| 摘要 |
A new active optical Atomic Force Microscopy (AFM) probe integrating monolithically a semiconductor laser source, an AFM tip, and a photodetector into a robust, easy-to use single semiconductor chip to enable both conventional AFM measurements and optical imaging and spectroscopy at the nanoscale. |
| 申请公布号 |
US9482691(B1) |
申请公布日期 |
2016.11.01 |
| 申请号 |
US201614991421 |
申请日期 |
2016.01.08 |
| 申请人 |
ACTOPROBE, LLC |
发明人 |
Ukhanov Alexander A.;Smolyakov Gennady A. |
| 分类号 |
G01Q60/22 |
主分类号 |
G01Q60/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An atomic force microscopy active optical probe comprising:
a semiconductor laser source; an atomic force microscopy probe tip; and a photodetector, all monolithically integrated into a single semiconductor chip to enable both conventional atomic force microscopy measurements and optical imaging and spectroscopy at the nanoscale. |
| 地址 |
Albuquerque NM US |
