VORRICHTUNG FUER VAKUUMBESCHICHTUNG.,申请号DE19853575952-传众专利搜索

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发明名称	VORRICHTUNG FUER VAKUUMBESCHICHTUNG.
摘要
申请公布号	DE3575952(D1)	申请公布日期	1990.03.15
申请号	DE19853575952	申请日期	1985.02.22
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	BLACKWELL, KIM JOSEPH, OWEGO NEW YORK 13827, US;WHITE, JR., RUSSELL THOMAS, BINGHAMTON NEW YORK 13903, US;WILSON, JAMES WARREN, VESTAL NEW YORK 13850, US
分类号	C23C14/34;C23C14/04;C23C14/22;C23C14/35;H01J37/34;H01L21/203;H01L21/285;H05K3/40;(IPC1-7):C23C14/24;H05K3/18	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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