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发明名称
THIN FILM VAPOR GROWTH DEVICE
摘要
申请公布号
JPH08321469(A)
申请公布日期
1996.12.03
申请号
JP19950148363
申请日期
1995.05.24
申请人
NISSIN ELECTRIC CO LTD
发明人
KUBOTA KIYOSHI
分类号
C23C16/44;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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