| 发明名称 |
LASER ABLATION SYSTEM INCLUDING VARIABLE ENERGY BEAM TO MINIMIZE ETCH-STOP MATERIAL DAMAGE |
| 摘要 |
An ablation system includes an ablation tool configured to generate an energy beam to ablate an energy-sensitive material formed on at least one embedded feature of a workpiece. The ablation tool selects an initial fluence and an initial pulse rate of the energy beam to ablate a first portion of the energy-sensitive layer. The ablation tool further reduces at least one of the initial fluence and the initial pulse rate of the energy beam to ablate a second remaining portion of the energy-sensitive layer such that the embedded feature is exposed without being damaged or deformed. |
| 申请公布号 |
US2016184926(A1) |
申请公布日期 |
2016.06.30 |
| 申请号 |
US201414585404 |
申请日期 |
2014.12.30 |
| 申请人 |
SUSS MicroTec Photonic Systems Inc. ;International Business Machines Corporation |
发明人 |
Sheets Courtney T.;Souter Matthew E.;Erwin Brian M.;Leenstra Bouwe W.;Polomoff Nicholas A.;Tessler Christopher L. |
| 分类号 |
B23K26/06;B23K26/362;B23K26/40;B23K26/03 |
主分类号 |
B23K26/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of ablating an energy-sensitive layer formed on at least one embedded feature of a workpiece, the method comprising:
directing an energy beam generated by an ablation tool to the energy-sensitive layer, the energy beam having an initial fluence and an initial pulse rate; ablating a first portion of the energy-sensitive layer according to at least one of the initial fluence and the initial pulse rate of the energy beam; reducing at least one of the initial fluence and the initial pulse rate of the energy beam; and ablating a second remaining portion of the energy-sensitive layer according to at least one of the reduced fluence and the reduced pulse rate of the energy beam such that the at least one embedded feature is exposed without being damaged or deformed. |
| 地址 |
Corona CA US |
