发明名称 |
Gas apparatus, systems, and methods for chamber ports |
摘要 |
An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects. |
申请公布号 |
US9435025(B2) |
申请公布日期 |
2016.09.06 |
申请号 |
US201314036754 |
申请日期 |
2013.09.25 |
申请人 |
Applied Materials, Inc. |
发明人 |
Madiwal Nagendra V.;Decottignies Robert Irwin;Nguyen Andrew;Reuter Paul B.;Sico Angela R.;Kuchar Michael;Morey Travis;Disanto Mitchell |
分类号 |
H01L21/677;C23C14/56;H01L21/67;C23C16/44 |
主分类号 |
H01L21/677 |
代理机构 |
Dugan & Dugan, PC |
代理人 |
Dugan & Dugan, PC |
主权项 |
1. A chamber port assembly of an electronic device manufacturing system, comprising:
a lid having a gas inlet formed therein and a first gas passageway extending there through, the first gas passageway in fluid communication with the gas inlet; a gas conduit member having a second gas passageway extending there through, the second gas passageway in fluid communication with the first gas passageway; a frame insert having a third gas passageway in fluid communication with the second gas passageway; and one or more gas nozzles coupled to the frame insert and in fluid communication with the third gas passageway, the one or more gas nozzles configured to direct a flow of gas received at the gas inlet into a substrate transfer area, the substrate transfer area configured to receive a substrate as the substrate is transferred through the chamber port assembly from a first chamber to a second chamber. |
地址 |
Santa Clara CA US |