| 摘要 |
The invention provides an inspection apparatus which inspects an object under a state that at least one object is arranged on a predetermined position. Light can penetrate through the object. The inspection apparatus comprises a light irradiation part for irradiating light toward the object, a light-passing though parts for allowing light capable of penetrating through internal parts of the objects whch is irradiated from the light irradiation part passing through, a light-receiving part for receiving the light passed through the light-passing though parts. Each light-passing though part is provided with a cover body which has a gap with the light-receiving part and can be separated from the light-receiving part. The cover body is provided with a first opening contacted with the object, a second opening part having a gap with the first opening, and a relay part disposed between the first opening and the second opening part. The relay part is stretchable on a direction substantially perpendicular to the first opening part. |
