发明名称 MANUFACTURE OF II-VI GROUP SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To satisfactorily reduce ohmic-contact of an electrode when a ZnTe layer is used as an electrode contact layer. CONSTITUTION:Relating to manufacture of II-VI group semiconductor element wherein a 11-VI group semiconductor layer and, over it, an electrode contact layer are epitaxial-grown, by ZnTe, on a substrate 1, the position of an impurities supply source 11 for introducing impurities at, at least, epitaxial growth an its surface layer is, in the process of epitaxial growth of an electrode contact layer, shifted toward substrate 1 side from the position of impurity supply source 11 at previous epitaxial growth, for epitaxial growth.
申请公布号 JPH0799211(A) 申请公布日期 1995.04.11
申请号 JP19930239984 申请日期 1993.09.27
申请人 SONY CORP 发明人 HIEI FUTOSHI;IKEDA MASAO;MATSUMOTO OSAMU
分类号 H01L21/203;H01L21/363;H01L33/28;H01L33/30;H01L33/40;H01S5/00 主分类号 H01L21/203
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