| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer boat wherein the part for mounting the periphery of the wafer of the maximum diameter is made to be smaller in area even when the range of diameters of mountable wafers is expanded, and wherein a number of wafers are mounted on columns of the same length even when the space above the periphery of a mounted wafer is enlarged. SOLUTION: A plurality of panel-type mounts 42, each for mounting the periphery of a wafer, are built with a gap between them along an arc surrounded by a plurality of columns 3. The mounts 42 are arranged in steps, each to be mounted with a wafer of a different diameter. A mount 42b for a small-diameter wafer is positioned lower than a mount 42c for a large-diameter wafer. COPYRIGHT: (C)2005,JPO&NCIPI |
