发明名称 Package-on-Package with via on pad connections
摘要 An interposer includes a core dielectric material, a conductive pipe penetrating through the core dielectric material, and a metal pad underlying the conductive pipe. The metal pad includes a center portion overlapped by a region encircled by the conductive pipe, and an outer portion in contact with the conductive pipe. A dielectric layer is underlying the core dielectric material and the metal pad. A via is in the dielectric layer, wherein the via is in physical contact with the center portion of the metal pad.
申请公布号 US9460977(B2) 申请公布日期 2016.10.04
申请号 US201514968066 申请日期 2015.12.14
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Wu Jiun Yi
分类号 H01L23/48;H01L23/31;H01L25/065;H01L23/00;H01L25/10;H01L23/13;H01L21/683;H01L23/498;H01L21/56;H01L25/00 主分类号 H01L23/48
代理机构 Slater Matsil, LLP 代理人 Slater Matsil, LLP
主权项 1. A structure comprising: a core dielectric material; a conductive pipe penetrating through the core dielectric material; a metal pad underlying the conductive pipe, wherein the metal pad comprises: a center portion overlapped by a region encircled by the conductive pipe; andan outer portion in contact with the conductive pipe; a dielectric layer underlying the core dielectric material and the metal pad; and a via in the dielectric layer, wherein the via is in physical contact with the center portion of the metal pad.
地址 Hsin-Chu TW
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