发明名称 |
Package-on-Package with via on pad connections |
摘要 |
An interposer includes a core dielectric material, a conductive pipe penetrating through the core dielectric material, and a metal pad underlying the conductive pipe. The metal pad includes a center portion overlapped by a region encircled by the conductive pipe, and an outer portion in contact with the conductive pipe. A dielectric layer is underlying the core dielectric material and the metal pad. A via is in the dielectric layer, wherein the via is in physical contact with the center portion of the metal pad. |
申请公布号 |
US9460977(B2) |
申请公布日期 |
2016.10.04 |
申请号 |
US201514968066 |
申请日期 |
2015.12.14 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Wu Jiun Yi |
分类号 |
H01L23/48;H01L23/31;H01L25/065;H01L23/00;H01L25/10;H01L23/13;H01L21/683;H01L23/498;H01L21/56;H01L25/00 |
主分类号 |
H01L23/48 |
代理机构 |
Slater Matsil, LLP |
代理人 |
Slater Matsil, LLP |
主权项 |
1. A structure comprising:
a core dielectric material; a conductive pipe penetrating through the core dielectric material; a metal pad underlying the conductive pipe, wherein the metal pad comprises:
a center portion overlapped by a region encircled by the conductive pipe; andan outer portion in contact with the conductive pipe; a dielectric layer underlying the core dielectric material and the metal pad; and a via in the dielectric layer, wherein the via is in physical contact with the center portion of the metal pad. |
地址 |
Hsin-Chu TW |