Method for pore sealing of porous materials using polyimide langmuir-blodgett film

摘要

Method for pore sealing a porous substrate, comprising: forming a continuous monolayer of a polyimide precursor on a liquid surface, transferring said polyimide precursor monolayer onto the porous substrate with the Langmuir-Blodgett technique, and imidization of the transferred polyimide precursor monolayers, thereby forming a polyimide sealing layer on the porous substrate. Porous substrate having at least one surface on which a sealing layer is provided to seal pores of the substrate, wherein the sealing layer is a polyimide having a thickness of a few monolayers and wherein there is no penetration of the polyimide into the pores.

主权项

1. A method for pore sealing a porous substrate, comprising:
(a) forming a continuous monolayer of a polyimide precursor on a liquid surface; and (b) transferring said polyimide precursor monolayer onto the porous substrate with the Langmuir-Blodgett technique, wherein the porous substrate is an ultra-low κ dielectric material having a dielectric constant κ lower than 2.3 and the porous substrate has a pore size of 1 to 5 nm; and further comprising: (c) imidization of the transferred polyimide precursor monolayers, thereby forming a polyimide sealing layer on the porous substrate.