| 摘要 |
PROBLEM TO BE SOLVED: To provide a method exhibiting a sufficient sealing effect while reducing the pressure applied to a substrate, in a manufacturing method for a sealing package using a metal powder sintered compact, formed of a metal paste, as a sealing material.SOLUTION: A manufacturing method for a package includes a step of hermetically sealing the interior of a sealing region surrounded by a sealing material, by superposing and bonding a pair of substrates where a sealing material is formed. In the invention, a sealing material formed of a sintered compact, produced by sintering one kind or more of metal powders, selected from gold, silver, palladium and platinum having a purity of 99.9 wt% or more and, and an average grain size of 0.005-1.0 μm, is used. On the substrate, at least one core material having a width narrower than the sealing material in the cross-sectional shape, and protruding from the surroundings is formed, so that when the pair of substrates are bonded, the core material compresses the sealing material and exhibits the sealing effect.SELECTED DRAWING: Figure 7 |
