发明名称 WAFER CONTAINER WITH DOOR ACTUATED WAFER RESTRAINT
摘要 A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.
申请公布号 KR20080091425(A) 申请公布日期 2008.10.13
申请号 KR20087011984 申请日期 2008.05.20
申请人 ENTEGRIS, INC. 发明人 BURNS JOHN;FULLER MATTHEW A.;KING JEFFERY J.;FORBES MARTIN L.;SMITH MARK V.
分类号 H01L21/673;B65D51/26;H01L21/68 主分类号 H01L21/673
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