发明名称 Collector having unused region for illumination system using a wavelength ?193nm
摘要 The lighting of micro structures uses an optical collector that is rotationally symmetrical about an axis between the light source (1) and the target (5). The collector has a number of mirror shells (40,42,44,46) set around the axis and positioned such that there is no overlapping effect
申请公布号 KR100846680(B1) 申请公布日期 2008.07.16
申请号 KR20037009728 申请日期 2003.07.23
申请人 发明人
分类号 G02B5/10;G21K1/06;G02B5/09;G02B17/06;G02B19/00;G03F1/16;G03F7/20;G21K5/00;G21K5/02;G21K5/04;H01L21/027 主分类号 G02B5/10
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