BULK ACOUSTIC WAVE ACCELEROMETERS

摘要

Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant Ke of the electromechanical system. A resonant accelerometer can be driven to resonate in a bulk acoustic wave mode of vibration, which can have a high resonant frequency. Other accelerometers and associated techniques are disclosed.

主权项

1. An accelerometer, comprising:
a resonator element configured to vibrate along a first axis in a bulk acoustic wave mode at a resonant frequency; and at least one electrode coupled to the resonator element to excite the resonator element to vibrate along the first axis in the bulk acoustic wave mode at the resonant frequency, and to detect a measurement signal.