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发明名称
Halbleiter-Beschleunigungserfassungsvorrichtung
摘要
申请公布号
DE19600541(C2)
申请公布日期
1998.07.30
申请号
DE19961000541
申请日期
1996.01.09
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
ARAKI, TORU, TOKIO/TOKYO, JP
分类号
G01P15/12;G01P21/00;(IPC1-7):G01P15/12;H01L49/00
主分类号
G01P15/12
代理机构
代理人
主权项
地址
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