发明名称 Ellipsometry Device Provided With A Resonance Platform
摘要 The invention relates to a useful improvement of an ellipsometer-type device. For this purpose, an existing ellipsometer is supplemented by a so-called resonance platform on which surface modes are excitable. Contrary to state of the art of known surface plasmons, the inventive modes are laterally localized. In addition, the resonance platform is not necessarily embodied in the form of a metal sheet. The inventive device also can be embodied in the form of an image-forming device. The inventive method consists in placing measurable samples on the platform surface and, afterwards, are exposed to light, thereby being excited in modes. The resonance position of modes is determined by the absorption behavior of a measurable substance.
申请公布号 US2007216901(A1) 申请公布日期 2007.09.20
申请号 US20050572284 申请日期 2005.07.18
申请人 OC OERLIKON BALZERS AG 发明人 WIKI MAX;EDLINGER JOHANNES;VAUPEL MATTHIAS;EING ANDREAS
分类号 G01J4/00;G01N21/21;G01N21/55 主分类号 G01J4/00
代理机构 代理人
主权项
地址