Apparatus, method and system for spectrometry with a displaceable waveguide structure

摘要

Techniques and mechanisms for a monolithic photonic integrated circuit (PIC) to provide spectrometry functionality. In an embodiment, the PIC comprises a photonic device, a first waveguide and a second waveguide, wherein one of the first waveguide and the second waveguide includes a released portion which is free to move relative to a substrate of the PIC. During a metering cycle to evaluate a material under test, control logic operates an actuator to successively configure a plurality of positions of the released portion relative to the photonic device. In another embodiment, light from the first waveguide is variously diffracted by a grating of the photonic device during the metering cycle, where portions of the light are directed into the second waveguide. Different wavelengths of light diffracted into the second waveguide may be successively detected, for different positions of the released portion, to determine spectrometric measurements over a range of wavelength.

主权项

1. A spectrometer device comprising:
a photonic device disposed over a substrate, the photonic device including a grating; a first waveguide disposed over the substrate; a second waveguide disposed over the substrate, wherein one of the first waveguide and the second waveguide includes a released portion which is free to move relative to the substrate; photodetector circuitry coupled to the second waveguide; control logic to configure a plurality of positions of the released portion relative to the photonic device, wherein, for each of the plurality of positions, while the position is configured:
the first waveguide to exchange with the photonic device respective light from a material under test;the grating to diffract a portion of the respective light into the second waveguide; andthe photodetector circuitry to take a respective spectrometric measurement of the material under test, including the photodetector circuitry to generate a signal indicating the level of the diffracted portion of the respective light directed into the second waveguide.