发明名称 Transistors, methods of manufacturing the same, and electronic devices including transistors
摘要 According to example embodiments, a transistor includes a gate, a channel layer that is separate from the gate, a gate insulating layer between the gate and the channel layer, and a source electrode and a drain electrode respectively contacting a first region and a second region of the channel layer. The gate insulating layer includes an impurity metal containing region that includes an impurity metal and contacts the channel layer. The gate insulating layer includes an impurity metal non-containing region contacting the gate that is not doped with the impurity metal.
申请公布号 US9508865(B2) 申请公布日期 2016.11.29
申请号 US201514664298 申请日期 2015.03.20
申请人 Samsung Electronics Co., Ltd. 发明人 Seon Jongbaek;Seo Seokjun;Kim Taesang;Ryu Myungkwan;Cho Seongho
分类号 H01L29/10;H01L29/786;H01L29/51;H01L29/49 主分类号 H01L29/10
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. A transistor comprising: a gate; a channel layer that is separate from the gate; a gate insulating layer between the gate and the channel layer, the gate insulating layer including an impurity metal containing region that includes an impurity metal and contacts the channel layer, the gate insulating layer including an impurity metal non-containing region that contacts the gate and is not doped with the impurity metal; and a source electrode and a drain electrode respectively contacting a first region and a second region of the channel layer, wherein at least a portion of the impurity metal containing region is between the impurity metal non-containing region and a portion of the channel layer between the source electrode and the drain electrode, the portion of the channel layer not overlapping the source electrode and the drain electrode.
地址 Gyeonggi-do KR
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