| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate visual inspection device simply structured by utilizing a sucking device having high holding force for simply holding a substrate of a specific shape. SOLUTION: This substrate visual inspection device is for inspecting the quality of the substrate by taking an image of a substrate that is an object under inspection to analyze the image. This device comprises holding members 3 and 4 for inspection, each made up of a Bernoulli chuck made by providing a plurality of nozzles 21 to a tabular chuck body 20 for detachably holding the substrate 100 in an erected state so as to confront a holding surface 2a, with a principal surface of the chuck body 20 used as the holding surface 2a for the substrate; movement members 6, 7, 8 and 9 for rectilinearly moving the holding members in the direction along the principal surface of the chuck body 20; and inspection camera devices 11 and 12 for imaging the substrate held by the holding members while the holding members move. COPYRIGHT: (C)2005,JPO&NCIPI
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