发明名称 |
METHOD FOR DETECTING PARTICLES AND DEFECTS AND INSPECTION EQUIPMENT THEREOF |
摘要 |
A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.
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申请公布号 |
US2010020315(A1) |
申请公布日期 |
2010.01.28 |
申请号 |
US20090574185 |
申请日期 |
2009.10.06 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
TOGASHI TAKAHIRO;MATSUI SHIGERU |
分类号 |
G01N21/00 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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