ILLUMINATION OPTICAL DEVICE, ILLUMINATION METHOD, AND EXPOSURE METHOD AND DEVICE

摘要

According to one embodiment, an illumination optical apparatus comprises: a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other; a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually; and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.

主权项

1. An illumination optical apparatus which illuminates an object with illumination light from a light source, comprising:
an optical integrator which is disposed on a light path of the illumination light; a reflecting member which includes pluralities of first and second reflecting surfaces, controls postures of the pluralities of first and second reflecting surfaces, and then applies an angle distribution to a plurality of beams reflected by the pluralities of first and second reflecting surfaces, the pluralities of first and second reflecting surfaces being arranged along a predetermined surface and disposed at an incident side of the optical integrator; a light amount changer which is disposed on the light path in an incident side of the reflecting member and changes light amount of the illumination light incident on the plurality of first reflecting surfaces and light amount of the illumination light incident on the plurality of second reflecting surfaces; and a polarization controller which is disposed on the light path in the incident side of the reflecting member and changes a polarization state of the illumination light incident on the plurality of first reflecting surfaces and a polarization state of the illumination light incident on the plurality of second reflecting surfaces.