LIGHT MODULATORS INCORPORATING MULTIPLE INTEGRATED LOW-CAPACITANCE INTERCONNECTS

摘要

This disclosure provides systems, methods and apparatus for reducing capacitance between interconnects in a display apparatus. In one aspect, a display apparatus can include a plurality of light modulators each having a shutter suspended over a substrate. A first suspended interconnect can electrically couple a first light modulator and a second light modulator. A majority of the length of the first suspended interconnect can be suspended a first height above the substrate. A second suspended interconnect can electrically couple the first light modulator and a third light modulator. A majority of the length of the second suspended interconnect can be above the substrate at a different height than the first suspended interconnect.

主权项

1. A display comprising:
a substrate; a plurality of light modulators, each including a shutter suspended over the substrate; a first suspended interconnect electrically coupling a first light modulator and a second light modulator of the plurality of light modulators, wherein more than 50% of a length of the first suspended interconnect is suspended at a first height over the substrate; and a second suspended interconnect electrically coupling the first light modulator to a third light modulator of the plurality of light modulators, wherein more than 50% of a length of the second suspended interconnect is suspended at a second height, different from the first height, over the substrate.