WIDE WRIST ARTICULATED ARM TRANSFER DEVICE,申请号EP19960943745-传众专利搜索

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发明名称	WIDE WRIST ARTICULATED ARM TRANSFER DEVICE
摘要
申请公布号	EP0866742(A4)	申请公布日期	1999.03.03
申请号	EP19960943745	申请日期	1996.12.12
申请人	BROOKS AUTOMATION, INC.	发明人	CAVENEY, ROBERT, T.;HOFMEISTER, CHRISTOPHER, A.
分类号	B25J9/06;B25J9/10;B25J17/02;B25J18/02;H01L21/677;H01L21/687;(IPC1-7):B25J18/02	主分类号	B25J9/06
代理机构		代理人
主权项
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