INTEGRATED MULTI-ELEMENT ACOUSTIC TRANSDUCERS AND METHODS OF MAKING THE SAME

摘要

A method of fabricating an acoustic transducer comprising: fabricating a substrate; depositing a bottom electrode on the substrate; depositing an active layer on the bottom electrode; depositing a top electrode on the active layer; wherein at least one electrode is patterned to form at least two active elements; and, wherein a ratio of a thickness coupling coefficient kt to an effective lateral coupling coefficient k31,eff of the active layer is 1.3 or greater.