发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT, PLL CIRCUIT, AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To differentiate the variation of inductance of each inductor incident to the in state of a sample significantly, while reducing the circuit area.SOLUTION: In a semiconductor integrated circuit (1), a sample (S) can be placed on a protective film (91) located above the surface of a lower side substrate (93) on the side where a first inductor (110) and a second inductor (120) are formed, where the direction from the lower side substrate (93) toward the protective film (91) is the height direction. A first metal layer (ML110) forming the first inductor (110) of an oscillation circuit (11) is located at a higher position than a second metal layer (ML120) forming the second inductor (120) of a divider circuit (12).SELECTED DRAWING: Figure 1
申请公布号 JP2016178248(A) 申请公布日期 2016.10.06
申请号 JP20150058481 申请日期 2015.03.20
申请人 SHARP CORP 发明人 MITSUNAKA TAKESHI;SAITO AKIRA;ASHIDA NOBUYUKI
分类号 H01L21/822;G01N27/22;H01L27/04;H03L7/08;H03L7/099 主分类号 H01L21/822
代理机构 代理人
主权项
地址