发明名称 |
SEMICONDUCTOR INTEGRATED CIRCUIT, PLL CIRCUIT, AND ELECTRONIC APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To differentiate the variation of inductance of each inductor incident to the in state of a sample significantly, while reducing the circuit area.SOLUTION: In a semiconductor integrated circuit (1), a sample (S) can be placed on a protective film (91) located above the surface of a lower side substrate (93) on the side where a first inductor (110) and a second inductor (120) are formed, where the direction from the lower side substrate (93) toward the protective film (91) is the height direction. A first metal layer (ML110) forming the first inductor (110) of an oscillation circuit (11) is located at a higher position than a second metal layer (ML120) forming the second inductor (120) of a divider circuit (12).SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016178248(A) |
申请公布日期 |
2016.10.06 |
申请号 |
JP20150058481 |
申请日期 |
2015.03.20 |
申请人 |
SHARP CORP |
发明人 |
MITSUNAKA TAKESHI;SAITO AKIRA;ASHIDA NOBUYUKI |
分类号 |
H01L21/822;G01N27/22;H01L27/04;H03L7/08;H03L7/099 |
主分类号 |
H01L21/822 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|