发明名称 METHOD AND APPARATUS FOR REACTING THIN FILMS ON LOW-TEMPERATURE SUBSTRATES AT HIGH SPEEDS
摘要 A method for reacting thin films on a low-temperature substrate within a reactive atmosphere is disclosed. The thin film contains a reducible metal oxide, and the reactive atmosphere contains a reducing gas such as hydrogen or methane. The low temperature substrate can be polymer, plastic or paper. Multiple light pulses from a high intensity strobe system are used to reduce the metal oxide to metal and to sinter the metal if applicable.
申请公布号 CA2740786(C) 申请公布日期 2016.05.24
申请号 CA20092740786 申请日期 2009.10.19
申请人 NCC NANO, LLC 发明人 SCHRODER, KURT A.
分类号 H05K3/22;H05K1/09;H05K3/12 主分类号 H05K3/22
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