发明名称 Method for Handling a Product Substrate, a Bonded Substrate System and a Temporary Adhesive
摘要 A method for handling a product substrate includes bonding a carrier to the product substrate. A layer of a permanent adhesive is applied onto a surface of the carrier. A structured intermediate layer is provided. The applied permanent adhesive bonds the carrier to the product substrate. The structured intermediate layer is arranged between the product substrate and the carrier. A surface of the structured intermediate layer and a surface of the permanent adhesive are in direct contact to a surface of the product substrate. The structured intermediate layer decreases a bonding strength between the product substrate and the carrier.
申请公布号 US2016218039(A1) 申请公布日期 2016.07.28
申请号 US201615002009 申请日期 2016.01.20
申请人 Infineon Technologies AG 发明人 Meyer-Berg Georg;von Waechter Claus;Bauer Michael;Doepke Holger;Maier Dominic;Porwol Daniel;Schmidt Tobias
分类号 H01L21/78;H05K3/00;H01L21/683 主分类号 H01L21/78
代理机构 代理人
主权项 1. A method for handling a product substrate, the method comprising: bonding a carrier to the product substrate by: applying a layer of a permanent adhesive onto a surface of the carrier;providing a structured intermediate layer; andbonding the carrier to the product substrate using the applied permanent adhesive, wherein the structured intermediate layer is arranged between the product substrate and the carrier, wherein a surface of the structured intermediate layer and a surface of the permanent adhesive are in direct contact to a surface of the product substrate, wherein the structured intermediate layer decreases a bonding strength between the product substrate and the carrier.
地址 Neubiberg DE
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