| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that when a pellicle frame is made after subjecting a pellicle frame member to surface treatment, bond strength possibly becomes weak.SOLUTION: In a pellicle frame 2 which includes a rectangular opening in a plane view, a circumference of the opening 4 is formed by connecting the edges of members subjected to surface treatment, and a part which is not subjected to surface treatment is provided on the edge surface of the edge of at least one member in junctions 22a-22h of the edges of the members. Even in the case of connecting the members subjected to surface treatment, the rigidity of the pellicle frame 2 can be made high, a handling ability becomes excellent, a dimension stability becomes good, and a yield can be improved.SELECTED DRAWING: Figure 2 |
