| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an evaporation apparatus capable of stably forming a good quality thin film and is highly suitable for mass production. <P>SOLUTION: The evaporation apparatus includes evaporation sources 3A, 3B discharging evaporation materials 32A, 32B in a state of vapor phase by heating, and can rolls 4A, 4B for holding an evaporation object 1 with the evaporation materials 32A, 32B in a state of vapor phase being adhered thereto and deposited thereon inside an evacuation treatment tank 2. Heat shield plates 5A, 5B constituted of a metal such as copper are located in the vicinity of the evaporation sources 3A, 3B between the evaporation sources 3A, 3B and the can rolls 4A, 4B. Thus, when performing the evaporation treatment on the evaporation object 1, the radiation heat from the evaporation sources 3A, 3B to the evaporation object 1 can be reduced, and the temperature rise of the evaporation object 1 itself can be suppressed. <P>COPYRIGHT: (C)2009,JPO&INPIT |
