| 摘要 |
The present invention is to provide a method for detecting transmitted laser beam, wherein the method can easily check a state of leaked light at low costs. The method for detecting transmitted laser beam according to the present invention places, inside an object to be processed, a light converging point of laser beam having a transmission property for the object to be processed in a plate shape having a first surface and a second surface opposite to the first surface, and irradiates laser beam from the first surface, thereby detecting laser beam transmitted to the second surface. The method for detecting transmitted laser beam according to the present comprises the steps of: a photosensitive sheet location providing step of making a photosensitive sheet which has a photosensitive layer face the second surface of the object to be processed, and making the object to be processed maintained as a maintenance surface of a chuck table through the photosensitive sheet; a laser beam irradiating step of irradiating the laser beam from the first surface of the object to be processed, after the photosensitive sheet location providing step; and a checking step of checking a state of transmitted laser beam via a photosensitive response area formed on the photosensitive layer of the photosensitive sheet, after the laser beam irradiating step. |
