| 摘要 |
<p>PURPOSE: To provide a measuring stage capable of conveying an object to be conveyed at a high speed with a simple structure and accurately positioning an object to be measured at the conveyed position in a vertical direction. CONSTITUTION: A roll member 50 is coupled to the lower side of a board holder 40, and a wedge-like member 60 is disposed at the lower side of the member 50. A gentle slope 61 and a steep slope 62 are formed on the upper main surface of the member 60. The member 60 is moved in a horizontal direction X in the state engaged with the slope 61 or 62 upon receiving of the drive force from a driving mechanism 70. In this case, when the cases of engaging with the slope 61 and 62 are observed, the moving amount of the member 50 in the vertical direction Z with respect to the movement of the member 60 in the horizontal direction X is small at the former and large at the latter.</p> |
