发明名称 Method and apparatus for classifying manufacturing outputs
摘要 A method for process monitoring involves acquiring data samples associated with a plurality of manufacturing related variables for a plurality of outputs of a manufacturing process. The distance of each data sample relative to every other data sample is then calculated. The outputs are then grouped based on the Euclidean distances that satisfy a boundary determining criterion.
申请公布号 US2007129836(A1) 申请公布日期 2007.06.07
申请号 US20050292485 申请日期 2005.12.02
申请人 MKS INSTRUMENTS, INC. 发明人 HENDLER LAWRENCE;RICHTER MATTHEW
分类号 G06F19/00 主分类号 G06F19/00
代理机构 代理人
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