| 摘要 |
PROBLEM TO BE SOLVED: To obtain a laser processing device capable of making the energy density distribution uniform in the irradiation range of a laser beam, and simplifying the alignment work of optical axes by multiple reflection of the laser beam, by installing the optical system, inclusive of a kaleido-scope, on the light path of the laser beam. SOLUTION: The laser beam from a stepless laser light volume controlling system 13 is incident on a uniform optical system 20, which includes an incident condensing lens 21, a kaleido-scope 22, and an ejection lens 23. In the uniform optical system 20, the laser, which has the density distribution of a single mode or a multiple mode, is made incident on the colloid reflecting mirror 22 through the incident condensing lens 21. The colloid reflecting mirror 22 makes the energy density distribution of the laser beam uniform by using the multiple reflection in the mirror. The laser beam coming from the uniform optical system 20, is incident on a laser beam forming mask 15 through the optical lens 14. The laser beam is projected on a smaller scale by a lens 16, and is deflected by a scanning system 17, and is ejected to a processing substrate 19 through an optical lens 18. |
