发明名称 |
Creating surface topography on an electrostatic chuck with a mandrel |
摘要 |
The invention includes an electrostatic chuck having surface topography and a method of making the same including the steps of providing a first insulative layer and a conductive layer laminated thereto. The first insulative layer is secured to a pedestal. A second insulative layer is deposited over the conductive layer and the first and second insulative layer and the copper layer are laminated together by a mandrel. The mandrel has recesses formed therein to produce an electrostatic chuck having a surface topography including raised features. The mandrel may have an annular groove defined therein for producing a raised gasket defined in the second insulative layer.
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申请公布号 |
US5986873(A) |
申请公布日期 |
1999.11.16 |
申请号 |
US19960673856 |
申请日期 |
1996.07.01 |
申请人 |
PACKARD HUGHES INTERCONNECT CO. |
发明人 |
THOMAS, RANDY LEE |
分类号 |
H02N13/00;(IPC1-7):H02N13/00 |
主分类号 |
H02N13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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