VERFAHREN ZUM THERMISCHEN BEHANDELN VON SUBSTRATEN,申请号DE20015012169-传众专利搜索

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发明名称	VERFAHREN ZUM THERMISCHEN BEHANDELN VON SUBSTRATEN
摘要
申请公布号	DE50112169(D1)	申请公布日期	2007.04.19
申请号	DE20015012169	申请日期	2001.11.28
申请人	HAMATECH APE GMBH & CO. KG	发明人	SZEKERESCH, JAKOB;DRESS, PETER;DIETZE, UWE;SAULE, WERNER
分类号	H01L21/00;H05B3/00;H01L21/02;H01L21/027	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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