| 摘要 |
<p>The present invention provides a photovoltaic device including a plurality of unit devices stacked, each unit device consisting of a silicon-based non-single-crystal semiconductor material and having a pn or pin structure, in which an oxygen atom concentration and/or a carbon atom concentration have maximum peaks in the vicinity of a p/n interface between the plurality of unit devices, thereby stabilizing the p/n interface and improving the interfacial characteristics and the film adhesion to attain a high photoelectric conversion efficiency of the photovoltaic device.
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