| 摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene, and catalyst-free substrate grown graphene. The manufacturing method of catalyst-free substrate grown graphene comprises the following steps of: (a) arranging a metal layer on a substrate; (b) supplying etching gas and carbon-containing gas, and conducting atmospheric pressure chemical vapor deposition (APCVD); (c) supplying etching gas on the catalyst-free layer in the carbon-containing supply, and growing graphene on the catalyst-free layer; and (d) growing graphene on the substrate without having the catalyst-free layer by continuously removing all of the catalyst-free layer by the etching gas. |
