| 摘要 |
A pressure sensor includes a piezoelectric detection electrode, an insulating substrate, a piezoelectric base film, a piezoelectric detection electrode and an insulating substrate. The insulating substrate includes a top face and a bottom face on which the piezoelectric detection electrode is formed. The insulating substrate includes a top face and a bottom face on which the piezoelectric detection electrode is formed. The pressure sensor includes the piezoelectric film whose opposite principal surfaces are provided with respective piezoelectric detection electrodes. When viewed from a direction orthogonal to the principal surfaces, an opening is provided in a center region of one of the piezoelectric detection electrodes provided on at least one of the principal surfaces. |
