发明名称
摘要 A lithography system is disclosed that provides an array of areas of imaging electromagnetic energy that are directed toward a recording medium. The reversible contrast-enhancement material is disposed between the recording medium and the array of areas of imaging electromagnetic energy.
申请公布号 JP2009524216(A) 申请公布日期 2009.06.25
申请号 JP20080550359 申请日期 2007.01.05
申请人 发明人
分类号 H01L21/027;C08J7/04;C08K3/04;C08K3/08;C08K5/1545;C08K5/357;C08L101/00;G03F7/20;G03F7/26 主分类号 H01L21/027
代理机构 代理人
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