| 摘要 |
PROBLEM TO BE SOLVED: To shorten a period of time to stop an inspection line for inspecting a liquid crystal substrate by eliminating the labor and time for a manual prober change work, and to eliminate an installation space for a prober storage rack. SOLUTION: This device 1 for inspecting the liquid crystal substrate is provided with: an inspecting machine (a load lock chamber 11) which inspects the substrate 30; and a prober changing machine 10 which replace the prober 6 used for substrate inspection. The prober exchanging machine 10e is provided with a rack 2 to store the prober 6. The period of time for inspecting the liquid crystal substrate is shortened by providing the inspecting machine and the prober exchanging machine, and the space for installing the rack is eliminated by using the prober changing machine as the rack to store the prober. COPYRIGHT: (C)2005,JPO&NCIPI
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